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Advanced Characterization and Fine Analysis / Chemical analysis

Mass Spectrometry

With Mass Spectrometry, the mass-to-charge ratio of atomic, molecular o cluster ions is accurately measured for analytical purpose. The Time Of Flight (TOF-MS) method allows fast timing and high sensitivity for nanostructures growth precursors and operando products from functional materials. TOF-MS in a reflectron type instrument with longitudinal extraction geometry is suited to analyze large molecular-weight species in a molecular beam, still allowing high-resolution mass-to-charge ratio determination.